|
| MOQ: | 1 Piece |
| Price: | US $ 15/PC |
| Standard Packaging: | Cylinder/Tank |
| Delivery Period: | 15 days |
| Payment Method: | L/C, T/T |
| Supply Capacity: | 200 Tons/Year |
Tungsten hexafluoride (WF6) is a chemical compound composed of one tungsten atom and six fluorine atoms. It is a colorless, corrosive gas with a pungent odor. Tungsten hexafluoride is highly reactive and can react violently with water or moisture in the air, releasing toxic hydrogen fluoride gas.
Applications of tungsten hexafluoride include its use as a precursor for depositing tungsten films in semiconductor manufacturing processes. It is commonly used in chemical vapor deposition (CVD) techniques to create thin films of tungsten for various applications, such as integrated circuit fabrication and thin-film coatings. Tungsten hexafluoride is preferred in these processes due to its high vapor pressure, which allows for efficient deposition.
However, it is important to handle and store tungsten hexafluoride with caution due to its reactivity and toxicity. Proper safety measures, including the use of appropriate protective equipment and handling procedures, should be followed when working with this compound.
| Test items | Units | Quality requirements | Test results |
| CF4 | ppm | <0.5 | <0.01 |
| O2 | ppm | <0.5 | <0.01 |
| N2 | ppm | <1 | 0.03 |
| CO | ppm | <0.5 | <0.02 |
| CO2 | ppm | <0.5 | <0.01 |
| SiF4 | ppm | <0.5 | <0.1 |
| SF6 | ppm | <0.5 | <0.1 |
| HF | ppm | <5 | 0.19 |
| Al | ppb | ≤10 | <0.020 |
| As | ppb | ≤10 | <0.001 |
| B | ppb | ≤10 | <0.005 |
| Ca | ppb | ≤5 | <0.200 |
| Cd | ppb | ≤2 | <0.001 |
| Cr | ppb | ≤10 | <0.020 |
| Fe | ppb | ≤10 | <0.007 |
| K | ppb | ≤5 | <0.100 |
| Mn | ppb | ≤10 | <0.001 |
| Na | ppb | ≤5 | <0.040 |
| Th | ppb | ≤0.1 | <0.001 |
| Ti | ppb | ≤10 | <0.002 |
| Li | ppb | ≤10 | <0.002 |
| U | ppb | ≤0.05 | <0.001 |
| Zn | ppb | ≤10 | <0.005 |
| Si | ppb | ≤10 | <0.100 |
| Pb | ppb | ≤10 | <0.001 |
| P | ppb | ≤2 | <0.300 |
| Mg | ppb | ≤10 | <0.020 |
| Ni | ppb | ≤20 | <0.030 |
| Cu | ppb | ≤5 | <0.005 |
| Mo | ppb | ≤10 | <0.001 |
| Total impurities of other metal | ppb | ≤500 | <0.0010 |
|
|
| MOQ: | 1 Piece |
| Price: | US $ 15/PC |
| Standard Packaging: | Cylinder/Tank |
| Delivery Period: | 15 days |
| Payment Method: | L/C, T/T |
| Supply Capacity: | 200 Tons/Year |
Tungsten hexafluoride (WF6) is a chemical compound composed of one tungsten atom and six fluorine atoms. It is a colorless, corrosive gas with a pungent odor. Tungsten hexafluoride is highly reactive and can react violently with water or moisture in the air, releasing toxic hydrogen fluoride gas.
Applications of tungsten hexafluoride include its use as a precursor for depositing tungsten films in semiconductor manufacturing processes. It is commonly used in chemical vapor deposition (CVD) techniques to create thin films of tungsten for various applications, such as integrated circuit fabrication and thin-film coatings. Tungsten hexafluoride is preferred in these processes due to its high vapor pressure, which allows for efficient deposition.
However, it is important to handle and store tungsten hexafluoride with caution due to its reactivity and toxicity. Proper safety measures, including the use of appropriate protective equipment and handling procedures, should be followed when working with this compound.
| Test items | Units | Quality requirements | Test results |
| CF4 | ppm | <0.5 | <0.01 |
| O2 | ppm | <0.5 | <0.01 |
| N2 | ppm | <1 | 0.03 |
| CO | ppm | <0.5 | <0.02 |
| CO2 | ppm | <0.5 | <0.01 |
| SiF4 | ppm | <0.5 | <0.1 |
| SF6 | ppm | <0.5 | <0.1 |
| HF | ppm | <5 | 0.19 |
| Al | ppb | ≤10 | <0.020 |
| As | ppb | ≤10 | <0.001 |
| B | ppb | ≤10 | <0.005 |
| Ca | ppb | ≤5 | <0.200 |
| Cd | ppb | ≤2 | <0.001 |
| Cr | ppb | ≤10 | <0.020 |
| Fe | ppb | ≤10 | <0.007 |
| K | ppb | ≤5 | <0.100 |
| Mn | ppb | ≤10 | <0.001 |
| Na | ppb | ≤5 | <0.040 |
| Th | ppb | ≤0.1 | <0.001 |
| Ti | ppb | ≤10 | <0.002 |
| Li | ppb | ≤10 | <0.002 |
| U | ppb | ≤0.05 | <0.001 |
| Zn | ppb | ≤10 | <0.005 |
| Si | ppb | ≤10 | <0.100 |
| Pb | ppb | ≤10 | <0.001 |
| P | ppb | ≤2 | <0.300 |
| Mg | ppb | ≤10 | <0.020 |
| Ni | ppb | ≤20 | <0.030 |
| Cu | ppb | ≤5 | <0.005 |
| Mo | ppb | ≤10 | <0.001 |
| Total impurities of other metal | ppb | ≤500 | <0.0010 |
