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WF6 Tungsten Film Deposition Semiconductor Industry Usage Cylinder Gas Tungsten Hexafluoride

WF6 Tungsten Film Deposition Semiconductor Industry Usage Cylinder Gas Tungsten Hexafluoride

MOQ: 1 Piece
Price: US $ 15/PC
Standard Packaging: Cylinder/Tank
Delivery Period: 15 days
Payment Method: L/C, T/T
Supply Capacity: 200 Tons/Year
Detail Information
Place of Origin
China
Brand Name
CMC
Certification
COA
Model Number
Wf6
Product Name:
Tungsten Hexafluoride
Transport:
By Sea
Appearance:
Colorless
Purity:
99.999%
Transport Package:
Sea Transportation
Specification:
10L/15kg
Trademark:
CMC
Origin:
China
HS Code:
2812190091
Supply Ability:
200t/Year
CAS No.:
7783-82-6
Formula:
Wf6
EINECS:
232-029-1
Constituent:
Industrial Pure Air
Grade Standard:
Industrial Grade
Chemical Property:
Combustion-Supporting Gas
Customization:
Available | Customized Request
Minimum Order Quantity:
1 Piece
Price:
US $ 15/PC
Packaging Details:
Cylinder/Tank
Delivery Time:
15 days
Payment Terms:
L/C, T/T
Supply Ability:
200 Tons/Year
Product Description

Product Description

WF6 refers to tungsten hexafluoride, which is a chemical compound composed of one tungsten atom bonded to six fluorine atoms. Here are some key points about WF6:

  1. Chemical Formula: WF6
  2. Molecular Weight: 297.84 g/mol
  3. Structure: WF6 has an octahedral molecular geometry, with the tungsten atom at the center and six fluorine atoms arranged around it.
  4. Physical Properties: Tungsten hexafluoride is a yellowish-green, volatile, and corrosive liquid at room temperature. It has a strong odor and can form white fumes when exposed to air due to its reaction with moisture.
  5. Uses: WF6 is primarily used in the semiconductor industry for chemical vapor deposition (CVD) processes. It is employed as a precursor in the formation of thin films of tungsten, which are used as conductive and barrier layers in integrated circuits and other electronic components.
  6. Reactivity: Tungsten hexafluoride is highly reactive and reacts readily with water, moisture, and many other compounds. It hydrolyzes in the presence of water to form tungstic acid and hydrofluoric acid, which are corrosive substances.
  7. Safety Considerations: WF6 is highly toxic and corrosive. It can cause severe burns and eye damage upon contact with the skin or eyes. Inhalation of its vapors or fumes can lead to respiratory irritation and lung damage. Proper safety measures, including the use of appropriate protective equipment and ventilation, should be followed when handling and working with WF6.
  8. Storage and Handling: WF6 is typically stored and transported in cylinders or containers made of materials resistant to its corrosive properties, such as stainless steel. Special care should be taken to prevent exposure to moisture, as it can react with water or humidity in the air.
  9. Environmental Impact: WF6 is not considered a significant greenhouse gas or ozone-depleting substance. However, its handling and disposal should be performed in accordance with local regulations and best practices to minimize environmental impact.

Product Spec:

Tungsten Hexafluoride WF6 GAS 
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3  
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade

The COA of Product:
 
Test items Units Quality requirements Test results
CF4 ppm <0.5 <0.01
O2 ppm <0.5 <0.01
N2 ppm <1 0.03
CO ppm <0.5 <0.02
CO2 ppm <0.5 <0.01
SiF4 ppm <0.5 <0.1
SF6 ppm <0.5 <0.1
HF ppm <5 0.19
Al ppb ≤10 <0.020
As ppb ≤10 <0.001
B ppb ≤10 <0.005
Ca ppb ≤5 <0.200
Cd ppb ≤2 <0.001
Cr ppb ≤10 <0.020
Fe ppb ≤10 <0.007
K ppb ≤5 <0.100
Mn ppb ≤10 <0.001
Na ppb ≤5 <0.040
Th ppb ≤0.1 <0.001
Ti ppb ≤10 <0.002
Li ppb ≤10 <0.002
U ppb ≤0.05 <0.001
Zn ppb ≤10 <0.005
Si ppb ≤10 <0.100
Pb ppb ≤10 <0.001
P ppb ≤2 <0.300
Mg ppb ≤10 <0.020
Ni ppb ≤20 <0.030
Cu ppb ≤5 <0.005
Mo ppb ≤10 <0.001
Total impurities of other metal ppb ≤500 <0.0010
 

Detailed Photos


WF6 Tungsten Film Deposition Semiconductor Industry Usage Cylinder Gas Tungsten Hexafluoride 0
 

Company Profile

China Best Price High Purity Tungsten Hexafluoride Wf6 Gas

Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas,  SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
China Best Price High Purity Tungsten Hexafluoride Wf6 Gas
China Best Price High Purity Tungsten Hexafluoride Wf6 Gas
 
products
PRODUCTS DETAILS
WF6 Tungsten Film Deposition Semiconductor Industry Usage Cylinder Gas Tungsten Hexafluoride
MOQ: 1 Piece
Price: US $ 15/PC
Standard Packaging: Cylinder/Tank
Delivery Period: 15 days
Payment Method: L/C, T/T
Supply Capacity: 200 Tons/Year
Detail Information
Place of Origin
China
Brand Name
CMC
Certification
COA
Model Number
Wf6
Product Name:
Tungsten Hexafluoride
Transport:
By Sea
Appearance:
Colorless
Purity:
99.999%
Transport Package:
Sea Transportation
Specification:
10L/15kg
Trademark:
CMC
Origin:
China
HS Code:
2812190091
Supply Ability:
200t/Year
CAS No.:
7783-82-6
Formula:
Wf6
EINECS:
232-029-1
Constituent:
Industrial Pure Air
Grade Standard:
Industrial Grade
Chemical Property:
Combustion-Supporting Gas
Customization:
Available | Customized Request
Minimum Order Quantity:
1 Piece
Price:
US $ 15/PC
Packaging Details:
Cylinder/Tank
Delivery Time:
15 days
Payment Terms:
L/C, T/T
Supply Ability:
200 Tons/Year
Product Description

Product Description

WF6 refers to tungsten hexafluoride, which is a chemical compound composed of one tungsten atom bonded to six fluorine atoms. Here are some key points about WF6:

  1. Chemical Formula: WF6
  2. Molecular Weight: 297.84 g/mol
  3. Structure: WF6 has an octahedral molecular geometry, with the tungsten atom at the center and six fluorine atoms arranged around it.
  4. Physical Properties: Tungsten hexafluoride is a yellowish-green, volatile, and corrosive liquid at room temperature. It has a strong odor and can form white fumes when exposed to air due to its reaction with moisture.
  5. Uses: WF6 is primarily used in the semiconductor industry for chemical vapor deposition (CVD) processes. It is employed as a precursor in the formation of thin films of tungsten, which are used as conductive and barrier layers in integrated circuits and other electronic components.
  6. Reactivity: Tungsten hexafluoride is highly reactive and reacts readily with water, moisture, and many other compounds. It hydrolyzes in the presence of water to form tungstic acid and hydrofluoric acid, which are corrosive substances.
  7. Safety Considerations: WF6 is highly toxic and corrosive. It can cause severe burns and eye damage upon contact with the skin or eyes. Inhalation of its vapors or fumes can lead to respiratory irritation and lung damage. Proper safety measures, including the use of appropriate protective equipment and ventilation, should be followed when handling and working with WF6.
  8. Storage and Handling: WF6 is typically stored and transported in cylinders or containers made of materials resistant to its corrosive properties, such as stainless steel. Special care should be taken to prevent exposure to moisture, as it can react with water or humidity in the air.
  9. Environmental Impact: WF6 is not considered a significant greenhouse gas or ozone-depleting substance. However, its handling and disposal should be performed in accordance with local regulations and best practices to minimize environmental impact.

Product Spec:

Tungsten Hexafluoride WF6 GAS 
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3  
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade

The COA of Product:
 
Test items Units Quality requirements Test results
CF4 ppm <0.5 <0.01
O2 ppm <0.5 <0.01
N2 ppm <1 0.03
CO ppm <0.5 <0.02
CO2 ppm <0.5 <0.01
SiF4 ppm <0.5 <0.1
SF6 ppm <0.5 <0.1
HF ppm <5 0.19
Al ppb ≤10 <0.020
As ppb ≤10 <0.001
B ppb ≤10 <0.005
Ca ppb ≤5 <0.200
Cd ppb ≤2 <0.001
Cr ppb ≤10 <0.020
Fe ppb ≤10 <0.007
K ppb ≤5 <0.100
Mn ppb ≤10 <0.001
Na ppb ≤5 <0.040
Th ppb ≤0.1 <0.001
Ti ppb ≤10 <0.002
Li ppb ≤10 <0.002
U ppb ≤0.05 <0.001
Zn ppb ≤10 <0.005
Si ppb ≤10 <0.100
Pb ppb ≤10 <0.001
P ppb ≤2 <0.300
Mg ppb ≤10 <0.020
Ni ppb ≤20 <0.030
Cu ppb ≤5 <0.005
Mo ppb ≤10 <0.001
Total impurities of other metal ppb ≤500 <0.0010
 

Detailed Photos


WF6 Tungsten Film Deposition Semiconductor Industry Usage Cylinder Gas Tungsten Hexafluoride 0
 

Company Profile

China Best Price High Purity Tungsten Hexafluoride Wf6 Gas

Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas,  SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
China Best Price High Purity Tungsten Hexafluoride Wf6 Gas
China Best Price High Purity Tungsten Hexafluoride Wf6 Gas
 
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