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Fluorinating agent Chemical Vapor Deposition (CVD) ProcessesSemiconductor Industry Usage Tungsten Hexafluoride

Fluorinating agent Chemical Vapor Deposition (CVD) ProcessesSemiconductor Industry Usage Tungsten Hexafluoride

MOQ: 1 Piece
Price: US $ 15/PC
Standard Packaging: Cylinder/Tank
Delivery Period: 15 days
Payment Method: L/C, T/T
Supply Capacity: 200 Tons/Year
Detail Information
Place of Origin
China
Brand Name
CMC
Certification
COA
Model Number
Wf6
Product Name:
Tungsten Hexafluoride
Purity:
99.999%
Appearance:
Colorless
DOT Class:
2.3
Un No:
Un2196
Einecs No:
7783-82-6
Transport Package:
200t/Year
Specification:
200t/Year
Trademark:
CMC
Origin:
China
HS Code:
2812190091
Supply Ability:
200t/Year
CAS No.:
7783-82-6
Formula:
Wf6
EINECS:
232-029-1
Constituent:
Industrial Pure Air
Grade Standard:
Industrial Grade
Chemical Property:
Combustion-Supporting Gas
Customization:
Available | Customized Request
Minimum Order Quantity:
1 Piece
Price:
US $ 15/PC
Packaging Details:
Cylinder/Tank
Delivery Time:
15 days
Payment Terms:
L/C, T/T
Supply Ability:
200 Tons/Year
Product Description

Product Description

Tungsten hexafluoride (WF6) is a chemical compound composed of one tungsten atom bonded to six fluorine atoms. It is a colorless, highly reactive gas at room temperature and pressure. Here are some key aspects of tungsten hexafluoride gas:

  1. Formula and Structure: The chemical formula for tungsten hexafluoride is WF6. It consists of one tungsten (W) atom bonded to six fluorine (F) atoms. The molecule has an octahedral structure, with the tungsten atom at the center and the fluorine atoms arranged around it.

  2. Physical Properties: Tungsten hexafluoride is a gas at standard temperature and pressure (STP). It boils at around 17.1°C (62.8°F) and is typically stored and handled in pressurized cylinders. It is denser than air, with a density of about 13.1 g/L.

  3. Reactivity: WF6 is extremely reactive and readily reacts with a wide range of substances, including water, oxygen, and many organic compounds. It is a powerful oxidizing agent, meaning it can readily accept electrons from other substances. It can react violently with water, releasing corrosive hydrofluoric acid and tungsten oxide.

  4. Uses: Tungsten hexafluoride finds applications in various industrial processes and research activities. Some common uses include:

    • Chemical Vapor Deposition (CVD): WF6 is used in the CVD process to deposit thin films of tungsten on surfaces. This technique is employed in the microelectronics industry for fabricating integrated circuits and other electronic components.

    • Metal Organic Chemical Vapor Deposition (MOCVD): WF6 is utilized in MOCVD processes to deposit thin films of tungsten for applications in optical coatings, semiconductor devices, and other thin-film applications.

    • Nuclear Reactor Control Rods: Tungsten hexafluoride can be used as a precursor for the production of tungsten control rods used in nuclear reactors.

    • Laboratory and Research: It is used in various research applications, such as studying chemical reactions, catalysts, and as a precursor in synthesizing other tungsten compounds.

  5. Safety Considerations: Tungsten hexafluoride is highly toxic and corrosive. Its reaction with moisture can release toxic and corrosive hydrofluoric acid, which can cause severe burns and tissue damage. Proper safety precautions, including the use of protective equipment and handling procedures, should be followed when working with this compound.

It's important to note that the information provided here is based on general knowledge, and specific applications or safety considerations may vary depending on the context and intended use. Always consult reliable sources and follow appropriate safety protocols when working with any chemical compound.

Product Spec:

Tungsten Hexafluoride WF6 GAS 
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3  
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade

The COA of Product:
 
Test items Units Quality requirements Test results
CF4 ppm <0.5 <0.01
O2 ppm <0.5 <0.01
N2 ppm <1 0.03
CO ppm <0.5 <0.02
CO2 ppm <0.5 <0.01
SiF4 ppm <0.5 <0.1
SF6 ppm <0.5 <0.1
HF ppm <5 0.19
Al ppb ≤10 <0.020
As ppb ≤10 <0.001
B ppb ≤10 <0.005
Ca ppb ≤5 <0.200
Cd ppb ≤2 <0.001
Cr ppb ≤10 <0.020
Fe ppb ≤10 <0.007
K ppb ≤5 <0.100
Mn ppb ≤10 <0.001
Na ppb ≤5 <0.040
Th ppb ≤0.1 <0.001
Ti ppb ≤10 <0.002
Li ppb ≤10 <0.002
U ppb ≤0.05 <0.001
Zn ppb ≤10 <0.005
Si ppb ≤10 <0.100
Pb ppb ≤10 <0.001
P ppb ≤2 <0.300
Mg ppb ≤10 <0.020
Ni ppb ≤20 <0.030
Cu ppb ≤5 <0.005
Mo ppb ≤10 <0.001
Total impurities of other metal ppb ≤500 <0.0010
 

Detailed Photos


Fluorinating agent Chemical Vapor Deposition (CVD) ProcessesSemiconductor Industry Usage Tungsten Hexafluoride 0
 

Company Profile

Wf6 Tungsten Hexafluoride with Electron Grade for Selling Wf6 Gas

Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas,  SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
Wf6 Tungsten Hexafluoride with Electron Grade for Selling Wf6 Gas
Wf6 Tungsten Hexafluoride with Electron Grade for Selling Wf6 Gas
 
products
PRODUCTS DETAILS
Fluorinating agent Chemical Vapor Deposition (CVD) ProcessesSemiconductor Industry Usage Tungsten Hexafluoride
MOQ: 1 Piece
Price: US $ 15/PC
Standard Packaging: Cylinder/Tank
Delivery Period: 15 days
Payment Method: L/C, T/T
Supply Capacity: 200 Tons/Year
Detail Information
Place of Origin
China
Brand Name
CMC
Certification
COA
Model Number
Wf6
Product Name:
Tungsten Hexafluoride
Purity:
99.999%
Appearance:
Colorless
DOT Class:
2.3
Un No:
Un2196
Einecs No:
7783-82-6
Transport Package:
200t/Year
Specification:
200t/Year
Trademark:
CMC
Origin:
China
HS Code:
2812190091
Supply Ability:
200t/Year
CAS No.:
7783-82-6
Formula:
Wf6
EINECS:
232-029-1
Constituent:
Industrial Pure Air
Grade Standard:
Industrial Grade
Chemical Property:
Combustion-Supporting Gas
Customization:
Available | Customized Request
Minimum Order Quantity:
1 Piece
Price:
US $ 15/PC
Packaging Details:
Cylinder/Tank
Delivery Time:
15 days
Payment Terms:
L/C, T/T
Supply Ability:
200 Tons/Year
Product Description

Product Description

Tungsten hexafluoride (WF6) is a chemical compound composed of one tungsten atom bonded to six fluorine atoms. It is a colorless, highly reactive gas at room temperature and pressure. Here are some key aspects of tungsten hexafluoride gas:

  1. Formula and Structure: The chemical formula for tungsten hexafluoride is WF6. It consists of one tungsten (W) atom bonded to six fluorine (F) atoms. The molecule has an octahedral structure, with the tungsten atom at the center and the fluorine atoms arranged around it.

  2. Physical Properties: Tungsten hexafluoride is a gas at standard temperature and pressure (STP). It boils at around 17.1°C (62.8°F) and is typically stored and handled in pressurized cylinders. It is denser than air, with a density of about 13.1 g/L.

  3. Reactivity: WF6 is extremely reactive and readily reacts with a wide range of substances, including water, oxygen, and many organic compounds. It is a powerful oxidizing agent, meaning it can readily accept electrons from other substances. It can react violently with water, releasing corrosive hydrofluoric acid and tungsten oxide.

  4. Uses: Tungsten hexafluoride finds applications in various industrial processes and research activities. Some common uses include:

    • Chemical Vapor Deposition (CVD): WF6 is used in the CVD process to deposit thin films of tungsten on surfaces. This technique is employed in the microelectronics industry for fabricating integrated circuits and other electronic components.

    • Metal Organic Chemical Vapor Deposition (MOCVD): WF6 is utilized in MOCVD processes to deposit thin films of tungsten for applications in optical coatings, semiconductor devices, and other thin-film applications.

    • Nuclear Reactor Control Rods: Tungsten hexafluoride can be used as a precursor for the production of tungsten control rods used in nuclear reactors.

    • Laboratory and Research: It is used in various research applications, such as studying chemical reactions, catalysts, and as a precursor in synthesizing other tungsten compounds.

  5. Safety Considerations: Tungsten hexafluoride is highly toxic and corrosive. Its reaction with moisture can release toxic and corrosive hydrofluoric acid, which can cause severe burns and tissue damage. Proper safety precautions, including the use of protective equipment and handling procedures, should be followed when working with this compound.

It's important to note that the information provided here is based on general knowledge, and specific applications or safety considerations may vary depending on the context and intended use. Always consult reliable sources and follow appropriate safety protocols when working with any chemical compound.

Product Spec:

Tungsten Hexafluoride WF6 GAS 
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3  
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade

The COA of Product:
 
Test items Units Quality requirements Test results
CF4 ppm <0.5 <0.01
O2 ppm <0.5 <0.01
N2 ppm <1 0.03
CO ppm <0.5 <0.02
CO2 ppm <0.5 <0.01
SiF4 ppm <0.5 <0.1
SF6 ppm <0.5 <0.1
HF ppm <5 0.19
Al ppb ≤10 <0.020
As ppb ≤10 <0.001
B ppb ≤10 <0.005
Ca ppb ≤5 <0.200
Cd ppb ≤2 <0.001
Cr ppb ≤10 <0.020
Fe ppb ≤10 <0.007
K ppb ≤5 <0.100
Mn ppb ≤10 <0.001
Na ppb ≤5 <0.040
Th ppb ≤0.1 <0.001
Ti ppb ≤10 <0.002
Li ppb ≤10 <0.002
U ppb ≤0.05 <0.001
Zn ppb ≤10 <0.005
Si ppb ≤10 <0.100
Pb ppb ≤10 <0.001
P ppb ≤2 <0.300
Mg ppb ≤10 <0.020
Ni ppb ≤20 <0.030
Cu ppb ≤5 <0.005
Mo ppb ≤10 <0.001
Total impurities of other metal ppb ≤500 <0.0010
 

Detailed Photos


Fluorinating agent Chemical Vapor Deposition (CVD) ProcessesSemiconductor Industry Usage Tungsten Hexafluoride 0
 

Company Profile

Wf6 Tungsten Hexafluoride with Electron Grade for Selling Wf6 Gas

Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas,  SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
Wf6 Tungsten Hexafluoride with Electron Grade for Selling Wf6 Gas
Wf6 Tungsten Hexafluoride with Electron Grade for Selling Wf6 Gas
 
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