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Semiconductor Manufacturing Cylinder Gas Tungsten Hexafluoride

Semiconductor Manufacturing Cylinder Gas Tungsten Hexafluoride

MOQ: 1 Piece
Price: US $ 15/PC
Standard Packaging: Cylinder/Tank
Delivery Period: 15 days
Payment Method: L/C, T/T
Supply Capacity: 200 Tons/Year
Detail Information
Place of Origin
China
Brand Name
CMC
Certification
COA
Model Number
Wf6
Product Name:
Tungsten Hexafluoride
Appearance:
Colorless
Orign:
China
Purity:
99.999%
Transport:
By Sea
Transport Package:
10L/15kg
Specification:
10L/15kg
Trademark:
CMC
Origin:
China
HS Code:
2812190091
Supply Ability:
200t/Year
CAS No.:
7783-82-6
Formula:
Wf6
EINECS:
232-029-1
Constituent:
Industrial Pure Air
Grade Standard:
Industrial Grade
Chemical Property:
Combustion-Supporting Gas
Customization:
Available | Customized Request
Minimum Order Quantity:
1 Piece
Price:
US $ 15/PC
Packaging Details:
Cylinder/Tank
Delivery Time:
15 days
Payment Terms:
L/C, T/T
Supply Ability:
200 Tons/Year
Product Description

Product Description

WF6 refers to tungsten hexafluoride, which is a chemical compound composed of one tungsten atom bonded to six fluorine atoms. Here are some key points about WF6:

  1. Chemical Formula: WF6
  2. Molecular Weight: 297.85 g/mol
  3. Structure:tungsten hexafluoride has an octahedral molecular geometry, with the tungsten atom at the center and six fluorine atoms arranged around it.

  4. Physical Properties: Tungsten hexafluoride is a yellowish-green gas at room temperature. It has a strong, pungent odor and is highly reactive.
  5. Chemical Reactivity: Tungsten hexafluoride is a highly reactive compound, especially with water and moisture. It hydrolyzes rapidly in the presence of water, releasing hydrofluoric acid (HF) and tungstic acid (H2WO4). The hydrofluoric acid produced is highly corrosive and toxic.

  6. Uses: Tungsten hexafluoride is primarily used in the semiconductor industry as a precursor for deposition of tungsten films during the fabrication of integrated circuits. It is also used in the production of tungsten metal and other tungsten compounds.
  7. Safety Considerations: Tungsten hexafluoride  is a hazardous compound due to its reactivity and the production of hydrofluoric acid upon contact with water or moisture. It is corrosive to many materials and can cause severe burns and tissue damage upon skin contact. Special care must be taken when handling, storing, and transporting WF6, and appropriate safety protocols must be followed.

  8. Environmental Impact: Tungsten hexafluoride is not considered a significant environmental pollutant. However, its hydrolysis products, such as hydrofluoric acid, can be harmful to the environment and must be handled and disposed of properly.
  9. Regulations: The use and handling of tungsten hexafluoride are subject to regulations and safety protocols to ensure the protection of workers and the environment. Regulatory bodies provide guidelines for the safe handling and disposal of WF6 and its byproducts.

 

Product Spec:

Tungsten Hexafluoride WF6 GAS 
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3  
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade

The COA of Product:
 
Test items Units Quality requirements Test results
CF4 ppm <0.5 <0.01
O2 ppm <0.5 <0.01
N2 ppm <1 0.03
CO ppm <0.5 <0.02
CO2 ppm <0.5 <0.01
SiF4 ppm <0.5 <0.1
SF6 ppm <0.5 <0.1
HF ppm <5 0.19
Al ppb ≤10 <0.020
As ppb ≤10 <0.001
B ppb ≤10 <0.005
Ca ppb ≤5 <0.200
Cd ppb ≤2 <0.001
Cr ppb ≤10 <0.020
Fe ppb ≤10 <0.007
K ppb ≤5 <0.100
Mn ppb ≤10 <0.001
Na ppb ≤5 <0.040
Th ppb ≤0.1 <0.001
Ti ppb ≤10 <0.002
Li ppb ≤10 <0.002
U ppb ≤0.05 <0.001
Zn ppb ≤10 <0.005
Si ppb ≤10 <0.100
Pb ppb ≤10 <0.001
P ppb ≤2 <0.300
Mg ppb ≤10 <0.020
Ni ppb ≤20 <0.030
Cu ppb ≤5 <0.005
Mo ppb ≤10 <0.001
Total impurities of other metal ppb ≤500 <0.0010
 

Detailed Photo


Semiconductor Manufacturing Cylinder Gas Tungsten Hexafluoride 0

 

Company Profile

China High Purity Wf6 Tungsten Hexafluoride Wf6 Gas

Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas,  SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
China High Purity Wf6 Tungsten Hexafluoride Wf6 Gas
China High Purity Wf6 Tungsten Hexafluoride Wf6 Gas
 
products
PRODUCTS DETAILS
Semiconductor Manufacturing Cylinder Gas Tungsten Hexafluoride
MOQ: 1 Piece
Price: US $ 15/PC
Standard Packaging: Cylinder/Tank
Delivery Period: 15 days
Payment Method: L/C, T/T
Supply Capacity: 200 Tons/Year
Detail Information
Place of Origin
China
Brand Name
CMC
Certification
COA
Model Number
Wf6
Product Name:
Tungsten Hexafluoride
Appearance:
Colorless
Orign:
China
Purity:
99.999%
Transport:
By Sea
Transport Package:
10L/15kg
Specification:
10L/15kg
Trademark:
CMC
Origin:
China
HS Code:
2812190091
Supply Ability:
200t/Year
CAS No.:
7783-82-6
Formula:
Wf6
EINECS:
232-029-1
Constituent:
Industrial Pure Air
Grade Standard:
Industrial Grade
Chemical Property:
Combustion-Supporting Gas
Customization:
Available | Customized Request
Minimum Order Quantity:
1 Piece
Price:
US $ 15/PC
Packaging Details:
Cylinder/Tank
Delivery Time:
15 days
Payment Terms:
L/C, T/T
Supply Ability:
200 Tons/Year
Product Description

Product Description

WF6 refers to tungsten hexafluoride, which is a chemical compound composed of one tungsten atom bonded to six fluorine atoms. Here are some key points about WF6:

  1. Chemical Formula: WF6
  2. Molecular Weight: 297.85 g/mol
  3. Structure:tungsten hexafluoride has an octahedral molecular geometry, with the tungsten atom at the center and six fluorine atoms arranged around it.

  4. Physical Properties: Tungsten hexafluoride is a yellowish-green gas at room temperature. It has a strong, pungent odor and is highly reactive.
  5. Chemical Reactivity: Tungsten hexafluoride is a highly reactive compound, especially with water and moisture. It hydrolyzes rapidly in the presence of water, releasing hydrofluoric acid (HF) and tungstic acid (H2WO4). The hydrofluoric acid produced is highly corrosive and toxic.

  6. Uses: Tungsten hexafluoride is primarily used in the semiconductor industry as a precursor for deposition of tungsten films during the fabrication of integrated circuits. It is also used in the production of tungsten metal and other tungsten compounds.
  7. Safety Considerations: Tungsten hexafluoride  is a hazardous compound due to its reactivity and the production of hydrofluoric acid upon contact with water or moisture. It is corrosive to many materials and can cause severe burns and tissue damage upon skin contact. Special care must be taken when handling, storing, and transporting WF6, and appropriate safety protocols must be followed.

  8. Environmental Impact: Tungsten hexafluoride is not considered a significant environmental pollutant. However, its hydrolysis products, such as hydrofluoric acid, can be harmful to the environment and must be handled and disposed of properly.
  9. Regulations: The use and handling of tungsten hexafluoride are subject to regulations and safety protocols to ensure the protection of workers and the environment. Regulatory bodies provide guidelines for the safe handling and disposal of WF6 and its byproducts.

 

Product Spec:

Tungsten Hexafluoride WF6 GAS 
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3  
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade

The COA of Product:
 
Test items Units Quality requirements Test results
CF4 ppm <0.5 <0.01
O2 ppm <0.5 <0.01
N2 ppm <1 0.03
CO ppm <0.5 <0.02
CO2 ppm <0.5 <0.01
SiF4 ppm <0.5 <0.1
SF6 ppm <0.5 <0.1
HF ppm <5 0.19
Al ppb ≤10 <0.020
As ppb ≤10 <0.001
B ppb ≤10 <0.005
Ca ppb ≤5 <0.200
Cd ppb ≤2 <0.001
Cr ppb ≤10 <0.020
Fe ppb ≤10 <0.007
K ppb ≤5 <0.100
Mn ppb ≤10 <0.001
Na ppb ≤5 <0.040
Th ppb ≤0.1 <0.001
Ti ppb ≤10 <0.002
Li ppb ≤10 <0.002
U ppb ≤0.05 <0.001
Zn ppb ≤10 <0.005
Si ppb ≤10 <0.100
Pb ppb ≤10 <0.001
P ppb ≤2 <0.300
Mg ppb ≤10 <0.020
Ni ppb ≤20 <0.030
Cu ppb ≤5 <0.005
Mo ppb ≤10 <0.001
Total impurities of other metal ppb ≤500 <0.0010
 

Detailed Photo


Semiconductor Manufacturing Cylinder Gas Tungsten Hexafluoride 0

 

Company Profile

China High Purity Wf6 Tungsten Hexafluoride Wf6 Gas

Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas,  SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
China High Purity Wf6 Tungsten Hexafluoride Wf6 Gas
China High Purity Wf6 Tungsten Hexafluoride Wf6 Gas
 
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